Understanding Hyperlith Tutorial 8 Barc Optimization With Standing Wave Metric

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  • Yellow fields can have formulas that refer to variables. Variables can take on multiple values. When variables with multiple values ...
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The A 32nm line is simulated at five different pitches. At each pitch a bias is sought to cause the line to print at 32nm. Panoramic Technology's

In this video we discuss the first steps towards tuning a resist parameter set to the empirical data. The experimental (or "empirical") ...

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